Kelvin Probe Systems

Single Point Kelvin Probe System
with Thomson I controller

operates under ambient conditions

is small enough to be placed in a customized glowth box

probe head operates with an oscillating membrane and can be easily exchanged

motorized z-motion for automatic approach

Single

Large Area Scanning Kelvin Probe System
with Thomson II controller

moves the KP-Head in vertical direction to realize an motorized approach between the KP Probe and the Sample

Samples are mounted on a Vacuum Chuck that moves the Sample across the Base Frame

KP Head can be easily exchanged

Scanning

Parallel Kelvin Probe System with Multi-Kelvin Controller

speeds up the work function imaging by parallelization

utilizes 9 KP heads with independent Z-axis.

Wafer samples clamped on a rotating chuck

spatial scan area overlap between KP heads by lateral motion

multikelvin

...with Environmental Option

Environment Controller