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Vista 300 Atomic Force Microscope

Vista 300 is the most advanced nano-chemical metrology instrument for R&D and failure analysis in nanofabrication.


Vista 300 Atomic Force Microscope

Specifications

Stage and Scanner

  • Sample stage travel: 300 mm × 300 mm
  • Scan size: 90 µm × 90 µm
  • Dual Z Feedback: 12 µm z-scanner with 600 nm fast-z for high bandwidth & large z-range

Functionality

  • Imaging modes: Non-contact AFM, PiFM, KPFM, cAFM, nano DMA, FvD (force vs distance) mapping
  • Spectroscopy modes: PiF-IR, FvD
  • Laser Options: QCL (770–1840, 1995–2395 cm−1), OPO/DFG (590–2050, 2250–4400, 5000–7000 cm−1)
  • Depth probed (IR): 20 nm (surface) & > 100 nm (bulk)

Physical Requirements

  • System dimensions: ~ 1.1 m × 1.1 m × 1.5 m (3’ 7.3” × 3’ 7.3” × 4’ 11”)
  • Enclosure: 400 mm × 200 mm access door minimizes thermal drift; removable without disconnecting cables
  • Temperature stability: ± 0.1 °C within enclosure

Applications

  • Semiconductor and nanofabrication failure analysis
  • Polymer, composite, and biomaterial characterization
  • 2D materials and thin-film research
  • Surface contamination and defect analysis
  • Chemical phase mapping of heterogeneous materials
EUV photoresist with a low dose

Industry Features

  • Cleanroom-compatible compact footprint
  • Automated laser alignment (computer-vision) & PiFM workflows to reduce operator training
  • Wide sample compatibility — wafers, polymers, thin films
  • Optional humidity or gas-controlled environment
  • Integrated safety interlocks and low-drift enclosure
  • Optimized for semiconductor failure analysis and advanced-materials quality control

Additional Technical Details

  • Computer-controlled polarization rotation
  • Integrated active vibration isolation platform
  • Insulated metal enclosure; temperature stability ±0.1 °C
  • Lasers mounted beneath the microscope for improved mechanical rigidity
  • Low-noise electronics with optimized cable routing
  • Service-friendly design with removable side panels and 400 mm front access

Software & Control

VistaScan™ provides a unified interface for AFM and PiFM operation. Automated laser alignment, spectral acquisition, and image analysis are all integrated into one workflow for maximum productivity and ease of use. Automation scripting & API provided for custom workflows

Optional Modules

  • Extended spectral-range laser packages
  • Environmental control enclosure and vacuum compatibility
  • Advanced PiFM signal-processing toolkit

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Anne D. Mueller