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Vista 200 Atomic Force Microscope

The Vista 200 delivers sub-5 nm IR spatial resolution with non-destructive PiFM and PiF-IR nanospectroscopy for wafers and masks, combining true non-contact AFM performance with integrated environmental control for maximum stability and precision.

Vista 200 Atomic Force Microscope

Specifications

Stage and Scanner

  • Sample stage travel: 200 mm × 200 mm square
  • Scan size: 120 µm × 120 µm
  • Dual Z Feedback: 12 µm z-scanner with 600 nm fast-z scanner

Functionality

  • Imaging modes: Non-contact AFM, PiFM, KPFM, cAFM, nano DMA, FvD (force vs distance) mapping
  • Spectroscopy modes: PiF-IR, FvD
  • Laser Options: QCL (770–1840, 1995–2395 cm−1), OPO/DFG (590–2050, 2250–4400, 5000–7000 cm−1)
  • Depth probed (IR): ~20 nm surface mode, >100 nm bulk mode

Physical Requirements

  • System dimensions: Requires a 1.2 m × 1.8 m (4 ft × 6 ft) optical breadboard
  • Enclosure: 300 mm × 200 mm access door; enclosure removable without disconnecting cables

Environmental / System Features

  • Built-in vibration isolation
  • Temperature-controlled acoustic enclosure (0.1 °C stability)
  • Fully enclosed, dry-air beam path
  • Self-contained system; no special lab environment required

Sample Handling / Industry Features

  • Vacuum chuck and EUV mask holder options
  • Support for 4-, 6-, and 8-inch wafers
  • Forward-moving stage and easy tip/sample exchange
  • 300 mm-wide door for minimal thermal drift
  • VistaScan™ provides an integrated acquisition and analysis workflow, including a scripting API for custom measurement

Applications

  • Semiconductor and nanofabrication failure analysis
  • Polymer, composite, and biomaterial characterization
  • 2D materials and thin-film research
  • Surface contamination and defect analysis
  • Chemical phase mapping of heterogeneous materials
Alternating lines of Cu and SiO2 with a half pitch of 50nm, have undergone SAM deposition to selectively coat the Cu lines followed by HfN ALD growth process.

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Anne D. Mueller