Calibration Grating TGG01
Add to cart
Lateral calibration
The TGG silicon calibration grating (5 x 5 x 0.45 mm) is a 1-D array of triangular steps for tip characterization in contact mode.
* equals periodicity of the gratings
1: flat, no structures
2: grating center, triangular line pattern
Typical applications
Lateral calibration
The TGG silicon calibration grating (5 x 5 x 0.45 mm) is a 1-D array of triangular steps for tip characterization in contact mode.
Description
| Step height : | 1.8 µm |
| Pitch* : | 3.0 µm ± 5 nm |
| Active area : | 3 mm x 3 mm |
| Edge radii : | < 10 nm |
| Edge curvature radii : | < 10 nm |
| Active area : | 3 mm x 3 mm |
Grating dimensions:
1: flat, no structures
2: grating center, triangular line pattern