Typical applications
Lateral calibration
The TGG silicon calibration grating (5 x 5 x 0.45 mm) is
a 1-D array of triangular steps for tip characterization in contact mode.
Description
Step height : |
1.8 µm |
Pitch* : |
3.0 µm ± 5 nm |
Active area : |
3 mm x 3 mm |
Edge radii : |
< 10 nm |
Edge curvature radii : |
< 10 nm |
Active area : |
3 mm x 3 mm |
* equals periodicity of the gratings
Grating dimensions:
1: flat, no structures
2: grating center, triangular line pattern