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Calibration Gratings for SPM Applications

Overview X-Y-Z-calibration

Type Pitch / Description Picture Price [€] Buy
UMG01 2 µm pitch chess pattern/
4 µm pitch line pattern/
21 nm height
UMG01 100,- €
WEBSHOP
UMG02 2 µm pitch chess pattern/
4 µm pitch line pattern/
  52 nm height
UMG02
100,- €
WEBSHOP
UMG500 500 nm chess pitch
20 µm line pitch
height = 20 nm
UMG500
200,- € WEBSHOP
TGZ01XYZ
TGZ02XYZ
TGZ03XYZ
5 & 10 µm pitch
Squares and holes

20/100/500 nm deep
TGXYZ
225,- €
WEBSHOP

Height Calibration

Type Pitch / Description Picture Price [€]
UMG01
UMG02

Height:
 21 nm
  58 nm
Chess/Line grating, 2/4 µm pitch
producer: Anfatec
UMG2
100,- €
WEBSHOP
TGZ01XYZ
TGZ02XYZ
TGZ03XYZ
5 & 10 µm pitch
Squares and holes

20/100/500 nm deep
TGXYZ
225,- €
WEBSHOP
TGZ1
TGZ2
TGZ3

Height:
19 nm
104 nm
540 nm
Line grating, 3 µm pitch
producer: TipsNano
TGZ
120,- €
WEBSHOP
TGZ1 Producer: MikroScience 100,- € WEBSHOP
TGZ01 Producer: MikroMasch 100,- € WEBSHOP

Lateral Calibration

Type Pitch / Description Picture Price [€]
TGX
3 µm pitch chess pattern
130 nm depth
producer: Mikromasch
TGX 225,- €
WEBSHOP
TGX1
3 µm pitch chess pattern
130 nm depth
producer: TipsNano
TGX1
200,- €
WEBSHOP
TGQ1
3 µm pitch chess pattern
19.5 nm depth
producer: TipsNano
TGQ1
300,- €
WEBSHOP
TDG01
278  pitch line pattern
> 55 nm depth
producer: TipsNano
TGG1
300,- €
WEBSHOP

Linearity Calibration / Tip calibration

Type Pitch / Description Picture Price [€]
TGG1 3 µm pitch / 70 deg angle
line pattern, 1.5 µm height
producer: TipsNano
TGG01
200,- €
WEBSHOP
TGF11 10 µm pitch / 54.44 deg angle
line pattern, 1.8 µm height
producer: MikroMasch
TGF11
225,- €
WEBSHOP
TGF11
producer: MikroScience 200,- €
WEBSHOP
TGT1
2.12 µm tip to tip distance
producer: TipsNano
TGT01
300,- €
WEBSHOP
PA01 tip characterizer
porous Aluminium
producer: MikroMasch
PA01
225,- €
WEBSHOP