Calibration Gratings for SPM Applications
Overview X-Y-Z-calibration
| Type | Pitch / Description | Picture | Price [€] | Buy |
| UMG01 | 2 µm pitch chess pattern/ 4 µm pitch line pattern/ 21 nm height |
 |
180,- € |
 |
| UMG02 (obsolete) | 2 µm pitch chess pattern/ 4 µm pitch line pattern/ 52 nm height |
|
180,- € |
|
| UMG500 | 500 nm chess pitch 20 µm line pitch height = 20 nm |
 |
200,- € | |
| TGZ01XYZ TGZ02XYZ TGZ03XYZ |
5 & 10 µm pitch Squares and holes 20/100/500 nm deep |
 |
235,- € |
|
Height Calibration
| Type | Pitch / Description | Picture | Price [€] | |
| UMG01 UMG02 |
Height: 21 nm 58 nm Chess/Line grating, 2/4 µm pitch producer: Anfatec |
|
100,- € |
|
| TGZ01XYZ TGZ02XYZ TGZ03XYZ |
5 & 10 µm pitch Squares and holes 20/100/500 nm deep |
|
235,- € |
|
Lateral Calibration
| Type | Pitch / Description | Picture | Price [€] | |
|
TGX |
3 µm pitch chess pattern 130 nm depth producer: Mikromasch |
 |
235,- € |
|
| TGX1
|
3 µm pitch chess pattern 130 nm depth producer: TipsNano |
 |
200,- € |
|
| TGQ1 |
3 µm pitch chess pattern 19.5 nm depth producer: TipsNano |
 |
300,- € |
|
Linearity Calibration / Tip calibration
| Type | Pitch / Description | Picture | Price [€] | |
| TGF11 | 10 µm pitch / 54.44 deg angle line pattern, 1.8 µm height producer: MikroMasch |
 |
235,- € |
|
| TGF11 |
producer: MikroScience | 200,- € |
|
|
| TGT1 |
2.12 µm tip to tip distance producer: TipsNano |
 |
300,- € |
|
| PA01 | tip characterizer porous Aluminium producer: MikroMasch |
 |
235,- € |
|