Ultrasharp ^TM Silicon Cantilever from MikroMasch

Single- lever

Cantilever	Resonance Frequency, kHz			Force Constant, N/m			Length l ± 5µm	Width w ± 3µm	Thickness t ± 0.5µm
Cantilever	min	typ	max	min	typ	max	Length l ± 5µm	Width w ± 3µm	Thickness t ± 0.5µm
14 Series	110	160	220	1.8	5	13	125	25	2.1
15 Series	265	325	410	20	40	80	125	30	4.0
16 Series	170	190	210	30	45	70	225	37.5	7.0
17 Series	10	13	17	0.06	0.18	0.4	450	50	2.0
18 Series	60	75	90	1.2	2.8	5.5	225	27.5	3.0
19 Series	25	65	120	0.05	0.5	2.3	125	22.5	1.0

THREE- lever

Cantilever	Resonance Frequency, kHz			Force Constant, N/m			Length l ± 5µm	Width w ± 3µm	Thickness t ± 0.5µm
Cantilever	min	typ	max	min	typ	max	Length l ± 5µm	Width w ± 3µm	Thickness t ± 0.5µm
35 Series
A	130	205	290	2.7	8.9	24	110	35	2.0
B	185	300	430	4.8	16	44	90	35	2.0
C	95	150	205	1.7	5.4	14	130	35	2.0
36 Series
A	30	90	160	0.1	1	4.6	110	32.5	1.0
B	45	130	240	0.2	2	9	90	32.5	1.0
C	25	65	115	0.06	0.06	2.7	130	32.5	1.0
37 Series
A	30	40	55	0.3	0.8	2	250	35	2.0
B	15	20	30	0.1	0.3	0.6	350	35	2.0
C	20	30	40	0.1	0.4	1	300	35	2.0
38 Series
A	8	20	32	0.01	0.09	0.36	250	32.5	1.0
B	5	10	17	0.003	0.03	0.13	350	32.5	1.0
C	6	14	23	0.005	0.05	0.21	300	32.5	1.0

FOUR- lever

Cantilever	Resonance Frequency, kHz			Force Constant, N/m			Length l ± 5µm	Width w ± 3µm	Thickness t ± 0.5µm
Cantilever	min	typ	max	min	typ	max	Length l ± 5µm	Width w ± 3µm	Thickness t ± 0.5µm
11 Series
A	12	15	18	0.1	0.2	0.4	500	30	2.7
B	60	80	100	1.1	2.7	5.6	210	30	2.7
C	115	155	200	3	7	16	150	30	2.7
D	250	350	465	17	42	90	100	50	2.7
12 Series
A	-	17	-	-	0.2	-	200	28	500
B	-	67	-	-	0.32	-	100	13.5	500