-->

Calibration Grating UMG01


Typical applications

  • height calibration

  • lateral calibration of smaller scan ranges

This grating was designed for the height calibration of scanners, whose scan range is too small to work with the typical grating. The chess pattern in the center of the grating allows overview calibration in x, y and z.



Description


  • Type / Material

Si-substrate / SiO2-Layer

  • Typical height

20 nm +/- 2 nm

  • Depth calibration

by measuring the thickness of the oxide before manufacturing

  • Center of the grating

    • Pitch*

2 µm x 2 µm (chess pattern 1 µm x 1 µm)

    • Dimensions

0,4 mm x 0,4 mm

  • Edge of the grating

    • Pitch x

2 µm Si / 2 µm SiO2 (pitch: 4 µm)

    • Pitch y

2 µm Si / 100 µm SiO2

    • Active area

2,4 mm x 2,4 mm

* equals periodicity of the gratings



Grating dimensions:


1: flat, no structures, 20 nm oxide
2: grating edge, line pattern, 5-10 nm
3: grating center, chess pattern, 5-10 nm


Grating structures in the central area:


Grating structures in the outer area: