Anfatec Instruments AG
Measurement Science and Technology &
Scanning Probe Microscopy

Self Sensing Cantilevers from SCL-Sensor.Tech

Piezo-Resistive Sensing (PRS) probes from SCL-Sensor.Tech are silicon cantilevers with an integrated piezo-resistor. They are used for self-sensing scanning probe microscopy applications. PRSA probes are additionally equipped with a thermal actuator for self-actuating operation. The piezo-resistors are integrated into a matched Wheatstone bridge to optimize the sensitivity and to compensate environmental thermal drift. By using the self-sensing readout no laser adjustment is necessary in comparison to conventional optical readout AFM systems. This gains time during a cantilever change. Furthermore free space above the cantilever opens a door for new applications and various instrument combinations. The cantilever provides a sharp tip for accurate measurements in various applications. The cantilever chip is bonded onto a small printed circuit board (PCB) with a small connector. The loading process of a fragile cantilever equipped with a connector is more easy and save. The counterpart PCB of the cantilever PCB is connected to a low-noise amplifier by a flat-flex-cable.


Self sensing cantilevers are bonded to a small printed circuit board (6 x 4.5 mm) with a small connector. Total height: 2.4 mm (cantilever chip, PCB and connector)


Tip shape of a self sensing cantilever


PRSA-probes

Piezo-Resistive Sensing Active (PRSA) cantilever probes from SCL-Sensor.Tech can be applied for contact and tapping mode. It provides an integrated heater for self actuation/oscillation of the cantilever.



PRSA-probe-cantilver

Tip Specification
Parameter PRSA-l300-f50 PRSA-l300-f80
Radius (tip apex) < 15 nm
Height 4...6 µm
Material silicon
Cantilever Specification
Resonant frequency 30...65 kHz 65...95 kHz
Spring constant 1...15 N/m 15...56 N/m
AFM mode contact mode tapping mode
Length 305 ± 5 µm
Width 110 ± 5 µm
Shape rectangular
Material silicon
Deflection sensing piezo-resistive bridge
Actuator external shaker or integrated active heater
Electrical connections bonded to small PCB with connector

Download Datasheet

PRS-probes

Piezo-Resistive Sensing (PRS) cantilever probes from SCL-Sensor.Tech for tapping mode and various cantilever based applications. With their short length they exhibit a high sensitivity and a low noise level.


PRS-probe-cantilver

Tip Specification
Parameter PRS-l85-f350 PRS-l85-f800
Radius (tip apex) < 15 nm
Height 4...7 µm
Material silicon
Cantilever Specification
Resonant frequency 250...450 kHz 450...1200 kHz
Spring constant 15...90 N/m 90...690 N/m
AFM mode tapping mode varoius applications
Length 85 ± 5 µm
Width 30 ± 1 µm
Shape rectangular
Material silicon
Deflection sensing piezo-resistive bridge
Actuator external shaker
Electrical connections bonded to small PCB with connector

Download Datasheet

Order information

# Short Description Number
of pieces		 Price per
piece [€]		 Price per
package [€]
1 PRS(A) CL Silicon self sensing cantilever (PRS or PRSA type)
bonded to a small PCB with a 10 pin connector		 1...9 110,00
10 85,00 850,00
20 72,00 1440,00
2 PRS(A) CL Silicon self sensing cantilever (PRS or PRSA type)
chip only		 1...9 105,00
10 80,00 800,00
20 72,00 1440,00
3 Self-sensing cantilever starter kit plus
1.) Pre-amplifier PCB with 2.5 MHz bandwidth, low noise, 100x gain, fixed 2V or flexible bridge supply voltage, onboard as well as
external offset voltage adjustment and screw mounting
holes in a plastic enclosure,
2.) cantilever counter part PCB with a flat cable (l=15cm) and
3.) shielded output cable (l=100cm);
4.) 2 boxes a 10 pieces self sensing standard cantilevers (PRSA, PRS) 		1 2075,00
4 Self-sensing cantilever starter kit 1.) Pre-amplifier PCB with 2.5 MHz bandwidth, low noise, 100x gain, fixed 2V or flexible bridge supply voltage, onboard as well as
external offset voltage adjustment and screw mounting
holes in a plastic enclosure,
2.) cantilever counter part PCB with a flat cable (l=15cm) and
3.) shielded output cable (l=100cm);
4.) 1 box with 10 pieces self sensing standard cantilevers (PRSA, PRS) 		1 1650,00
5 Preamplifier Pre-amplifier PCB with 2.5 MHz bandwidth, low noise, 100x gain, fixed 2V or flexible bridge supply voltage, onboard as well as
external offset voltage adjustment and screw mounting
holes in a plastic enclosure, 		1 1100,00
All prices are customer prices excl. VAT

Anfatec Instruments AG welcomes the opportunity to serve your inquiries, orders, and any questions. You can reach us via e-mail (mailbox@anfatec.de) or phone (+49-37421-24212). You can place orders by e-mail or fax (+49-37421-24212).

Delivery time:
  • 1 week in case it is available from German stock.
  • For special orders please ask for delivery time.

Delivery costs:
  • Inside Germany: 3.90 €
  • Other countries: depending on location and amount between 8 € and 25 €
We reserve the right to change prices and do not take over guarantee for misprints.