Anfatec Instruments AG
Measurement Science and Technology &
Scanning Probe Microscopy

Calibration Grating KPFM

Typical applications

→ KPFM/EFM test measurements

→ Lateral calibration

This grating has been developed as a reference sample for KPFM / EFM measurements where a well-defined material contrast is desired. The chess pattern allows calibration in lateral direction, too.

Technical Data

Substrate : N(Ph 1-5 Ohm·cm) Si
Au Height : 10 ± 5 nm
Chess Pitch : 5 µm
Chess Area : 500 µm x 500 µm
Line Pitch : 20 µm
Line Length : 500 µm

Grating dimensions:

Grating dimensions

The active area of 1 mm x 1mm i divided into 4 x 4 fields, each of them 250 µm by 250 µm large. The outer (blue) fields show meander structures of 10 µm pitch. The inner 2 x 2 fields are chesses of 5 µm pitch with 2 different aspect ratios.

SEM Image Full Structure

SEM Images

FM-KPFM Images

Scan Range: 20 µm



Surface Potential


Download Datasheet AU_KPFMGrating_DataSheet.pdf

(914 KB)