Anfatec Instruments AG
Measurement Science and Technology &
Scanning Probe Microscopy

Calibration Grating KPFM

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Typical applications

→ KPFM/EFM test measurements

→ Lateral calibration

This grating has been developed as a reference sample for KPFM / EFM measurements where a well-defined material contrast is desired. The chess pattern allows calibration in lateral direction, too.


Technical Data

Substrate : N(Ph 1-5 Ohm·cm) Si
Au Height : 10 ± 5 nm
Chess Pitch : 5 Ám
Chess Area : 500 Ám x 500 Ám
Line Pitch : 20 Ám
Line Length : 500 Ám


Grating dimensions:

Grating dimensions

The active area of 1 mm x 1mm i divided into 4 x 4 fields, each of them 250 Ám by 250 Ám large. The outer (blue) fields show meander structures of 10 Ám pitch. The inner 2 x 2 fields are chesses of 5 Ám pitch with 2 different aspect ratios.



SEM Image Full Structure



SEM Images

FM-KPFM Images

Scan Range: 20 µm

Topography

Amplitude

Surface Potential

Phase



Download Datasheet AU_KPFMGrating_DataSheet.pdf

(914 KB)