Anfatec Instruments AG
Measurement Science and Technology &
Scanning Probe Microscopy

Calibration Grating TGZ02

Typical applications

  • height calibration

TGZ series are 1-D arrays of rectangular SiO2 steps on a Si wafer for vertical calibration. Due to the lithography process, the corners of the steps and troughs can be slightly rounded.



  • Step height

120 nm ± 0.5 nm

  • Pitch*

3.0 µm ± 5 nm

  • Active area

3 mm x 3 mm

* equals periodicity of the gratings

Grating dimensions:

1: flat, no structures
2: grating center, line pattern