Anfatec Instruments AG
Measurement Science and Technology &
Scanning Probe Microscopy

Calibration Grating TGZ01

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Typical applications

→ height calibration

TGZ series are 1-D arrays of rectangular SiO2 steps on a Si wafer for vertical calibration. Due to the lithography process, the corners of the steps and troughs can be slightly rounded.



Step height : 22.5 nm ± 0.5 nm
Pitch* : 3.0 µm
Active area : 3 mm x 3 mm

* equals periodicity of the gratings

Grating dimensions:

1: flat, no structures
2: grating center, line pattern