Anfatec Instruments AG
Measurement Science and Technology &
Scanning Probe Microscopy

Calibration Grating TGZ01


Typical applications

  • height calibration

TGZ series are 1-D arrays of rectangular SiO2 steps on a Si wafer for vertical calibration. Due to the lithography process, the corners of the steps and troughs can be slightly rounded.

TGZ01

Description


  • Step height

22.5 nm ± 0.5 nm

  • Pitch*

3.0 µm

  • Active area

3 mm x 3 mm

* equals periodicity of the gratings


Grating dimensions:



1: flat, no structures
2: grating center, line pattern