Anfatec Instruments AG
Measurement Science and Technology &
Scanning Probe Microscopy

Calibration Grating TGX01


Typical applications

  • lateral calibration

The TGX series (5 x 5 x 0.45 mm) is a chessboard-like array of square pillars with sharp undercut edges for lateral scanner calibration.

TGX01

Description


  • Step height

1 m

  • Pitch*

3.0 m 5 nm

  • Active area

2 mm x 2 mm

  • Edge radii

< 5 nm

  • Edge curvature radii

< 5 nm

* equals periodicity of the gratings


Grating dimensions:



1: flat, no structures
2: grating center, chess pattern