Anfatec Instruments AG
Measurement Science and Technology &
Scanning Probe Microscopy

Calibration Grating TGX01

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Typical applications

→ lateral calibration

The TGX series (5 x 5 x 0.45 mm) is a chessboard-like array of square pillars with sharp undercut edges for lateral scanner calibration.

TGX01

Description


Step height : 1 µm
Pitch* : 3.0 µm ± 5 nm
Active area : 2 mm x 2 mm
Edge radii : < 5 nm
Edge curvature radii : < 5 nm


* equals periodicity of the gratings


Grating dimensions:



1: flat, no structures
2: grating center, chess pattern