Anfatec Instruments AG
Measurement Science and Technology &
Scanning Probe Microscopy


Grating Set TGS03


Consisting of:








TGG01

TGX01

PA01

Step height 1.8 m 1 m -
Pitch 3.0 m 5 nm 3.0 m 5 nm -
Active area 3 x 3 mm 2 x 2 mm 5 x 5 mm