Anfatec Instruments AG
Measurement Science and Technology &
Scanning Probe Microscopy

Grating Set TGS02


Consisting of:














TGZ01

TGZ02

TGZ03

TGG01

TGX01

PA01

Step height 22.5 nm 0.5 nm 120 nm 0.5 nm 506 nm 5 nm 1.8 m 1 m -
Pitch 3.0 m 3.0 m 3.0 m 3.0 m 5 nm 3.0 m 5 nm -
Active area 3 x 3 mm 3 x 3 mm 3 x 3 mm 3 x 3 mm 2 x 2 mm 5 x 5 mm