Anfatec Instruments AG
Measurement Science and Technology &
Scanning Probe Microscopy


Grating Set TGS02


Consisting of:














TGZ01

TGZ02

TGZ03

TGG01

TGX01

PA01

Step height 22.5 nm ▒ 0.5 nm 120 nm ▒ 0.5 nm 506 nm ▒ 5 nm 1.8 Ám 1 Ám -
Pitch 3.0 Ám 3.0 Ám 3.0 Ám 3.0 Ám ▒ 5 nm 3.0 Ám ▒ 5 nm -
Active area 3 x 3 mm 3 x 3 mm 3 x 3 mm 3 x 3 mm 2 x 2 mm 5 x 5 mm