Anfatec Instruments AG
Measurement Science and Technology &
Scanning Probe Microscopy

Grating Set TGS01


Consisting of:








TGZ01

TGZ02

TGZ03

Step height 22.5 nm ± 0.5 nm 120 nm ± 0.5 nm 506 nm ± 5 nm
Pitch 3.0 µm 3.0 µm 3.0 µm
Active area 3 x 3 mm 3 x 3 mm 3 x 3 mm