Anfatec Instruments AG
Measurement Science and Technology &
Scanning Probe Microscopy

Calibration Grating TGG01


Typical applications

  • lateral calibration

The TGG silicon calibration grating (5 x 5 x 0.45 mm) is a 1-D array of triangular steps for tip characterization in contact mode.

TGG01

Description


  • Step height

1.8 m

  • Pitch*

3.0 m 5 nm

  • Active area

3 mm x 3 mm

  • Edge radii

< 10 nm

  • Edge curvature radii

< 10 nm

* equals periodicity of the gratings


Grating dimensions:



1: flat, no structures
2: grating center, triangular line pattern