Overview X-Y-Z-calibration
| Type |
Pitch / Description |
Picture |
Price [€] |
Buy |
| UMG01 |
2 µm pitch chess pattern/
4 µm pitch line pattern/
21 nm height |
 |
100,- €
|
 |
| UMG02 |
2 µm pitch chess pattern/
4 µm pitch line pattern/
52 nm height |
|
100,- €
|
|
| UMG500 |
500 nm chess pitch
20 µm line pitch
height = 20 nm |
|
200,- € |
|
TGZ01XYZ
TGZ02XYZ
TGZ03XYZ
|
5 & 10 µm pitch
Squares and holes
20/100/500 nm deep
|
|
200,- €
|
|
|
Height Calibration
| Type |
Pitch / Description |
Picture |
Price [€] |
UMG01
UMG02
|
Height:
21 nm
58 nm
Chess/Line grating, 2/4 µm pitch
producer: Anfatec
|
|
100,- €
|
|
TGZ01
TGZ02
TGZ03
|
Height:
20 nm
98 nm
496 nm
Line grating, 3 µm pitch
producer: MikroMasch |
|
100,- €
|
|
TGZ1
TGZ2
TGZ3
|
Height:
19 nm
104 nm
540 nm
Line grating, 3 µm pitch
producer: TipsNano
|
|
100,- €
|
|
| TGZ1 |
Producer: MikroScience |
|
100,- € |
|
| SHS-01 |
Producer: AppNano |
|
300,- € |
|
|
Lateral Calibration
| Type |
Pitch / Description |
Picture |
Price [€] |
TGX01
TGX01P
|
3 µm pitch chess pattern
130 nm depth
producer: Mikromasch
|
 |
200,- €
|
|
TGX11
TGX11P
|
10 µm pitch chess pattern
130 nm depth
producer: Mikromasch |
|
200,- €
|
|
TGX1
|
3 µm pitch chess pattern
130 nm depth
producer: TipsNano |
|
200,- €
|
|
TGQ1
|
3 µm pitch chess pattern
19.5 nm depth
producer: NT-MDT |
|
300,- €
|
|
TDG01
|
278 pitch line pattern
> 55 nm depth
producer: NT-MDT |
|
255,- €
|
|
|
Linearity Calibration / Tip calibration
| Type |
Pitch / Description |
Picture |
Price [€] |
| TGG1
|
3 µm pitch / 70 deg angle
line pattern, 1.5 µm height
producer: NT-MDT
|
 |
200,- €
|
|
| TGG01 |
3 µm pitch / 70 deg angle
line pattern, 1.5 µm height
producer: MikroMasch |
|
200,- €
|
|
| TGF11 |
10 µm pitch / 54.44 deg angle
line pattern, 1.8 µm height
producer: MikroMasch |
|
200,- €
|
|
TGF11
|
producer: MikroScience |
|
200,- €
|
|
TGT1
|
2.12 µm tip to tip distance
producer: NT-MDT |
|
300,- €
|
|
| PA01
|
tip characterizer
porous Aluminium
producer: MikroMasch |
|
200,- €
|
|
|
|
