Anfatec Instruments AG Measurement Science and Technology & Scanning Probe Microscopy

Calibration Gratings for SPM Applications

Overview X-Y-Z-calibration Type Pitch / Description Picture Price UMG01 2 µm pitch chess pattern/ 4 µm pitch line pattern/ 21 nm height 110,- € UMG02 2 µm pitch chess pattern/ 4 µm pitch line pattern/   52 nm height 110,- € UMG03Pt 2 µm pitch chess pattern/ 4 µm pitch line pattern/ 58 nm height PtSi-coated 110,- € TGZ01XYZ TGZ02XYZ TGZ03XYZ 5 & 10 µm pitch Squares and holes 20/100/500 nm deep 200,- € Height Calibration Type Pitch / Description Picture Price UMG01 UMG02 UMG03Pt Height:   21 nm   52 nm   58 nm Chess/Line grating, 2/4 µm pitch producer: Anfatec 110,- € TGZ01 TGZ02 TGZ03 Height:   20 nm   98 nm   496 nm Line grating, 3 µm pitch producer: MikroMasch 100,- € TGZ1 TGZ2 TGZ3 Height: 19 nm 104 nm 540 nm Line grating, 3 µm pitch producer: NT-MDT 100,- € Lateral Calibration Type Pitch / Description Picture Price TGX01 TGX01P 3 µm pitch chess pattern 130 nm depth producer: Mikromasch 200,- € TGX11 TGX11P 10 µm pitch chess pattern 130 nm depth producer: Mikromasch 200,- € TGX1 3 µm pitch chess pattern 130 nm depth producer: NT-MDT 200,- € TGQ1 3 µm pitch chess pattern 19.5 nm depth producer: NT-MDT 300,- € TDG01 TDG1Au 278  pitch line pattern > 55 nm depth producer: NT-MDT 200,- € Linearity Calibration / Tip calibration Type Pitch / Description Picture Price TGG1 3 µm pitch / 70 ° angle line pattern, 1.5 µm height producer: NT-MDT 200,- € TGG01 3 µm pitch / 70 ° angle line pattern, 1.5 µm height producer: MikroMasch 200,- € TGF11 10 µm pitch / 54.44 ° angle line pattern, 1.8 µm height producer: MikroMasch 200,- € TGT1 2.12 µm tip to tip distance producer: NT-MDT 300,- € PA01 tip characterizer porous Aluminium producer: MikroMasch 200,- €