Overview X-Y-Z-calibration
Type |
Pitch / Description |
Picture |
Price [€] |
Buy |
UMG01 |
2 µm pitch chess pattern/
4 µm pitch line pattern/
21 nm height |
|
100,- €
|
 |
UMG02 |
2 µm pitch chess pattern/
4 µm pitch line pattern/
52 nm height |

|
100,- €
|
 |
UMG500 |
500 nm chess pitch
20 µm line pitch
height = 20 nm |

|
200,- € |
 |
TGZ01XYZ
TGZ02XYZ
TGZ03XYZ
|
5 & 10 µm pitch
Squares and holes
20/100/500 nm deep
|

|
200,- €
|
 |
|
Height Calibration
Type |
Pitch / Description |
Picture |
Price [€] |
UMG01
UMG02
|
Height:
21 nm
58 nm
Chess/Line grating, 2/4 µm pitch
producer: Anfatec
|

|
100,- €
|
 |
TGZ01
TGZ02
TGZ03
|
Height:
20 nm
98 nm
496 nm
Line grating, 3 µm pitch
producer: MikroMasch |

|
100,- €
|
 |
TGZ1
TGZ2
TGZ3
|
Height:
19 nm
104 nm
540 nm
Line grating, 3 µm pitch
producer: TipsNano
|

|
100,- €
|
 |
TGZ1 |
Producer: MikroScience |
|
100,- € |
 |
SHS-01 |
Producer: AppNano |
|
300,- € |
 |
|
Lateral Calibration
Type |
Pitch / Description |
Picture |
Price [€] |
TGX01
TGX01P
|
3 µm pitch chess pattern
130 nm depth
producer: Mikromasch
|
|
200,- €
|
 |
TGX11
TGX11P
|
10 µm pitch chess pattern
130 nm depth
producer: Mikromasch |
|
200,- €
|
 |
TGX1
|
3 µm pitch chess pattern
130 nm depth
producer: TipsNano |

|
200,- €
|
 |
TGQ1
|
3 µm pitch chess pattern
19.5 nm depth
producer: NT-MDT |

|
300,- €
|
 |
TDG01
|
278 pitch line pattern
> 55 nm depth
producer: NT-MDT |

|
255,- €
|
 |
|
Linearity Calibration / Tip calibration
Type |
Pitch / Description |
Picture |
Price [€] |
TGG1
|
3 µm pitch / 70 deg angle
line pattern, 1.5 µm height
producer: NT-MDT
|
|
200,- €
|
 |
TGG01 |
3 µm pitch / 70 deg angle
line pattern, 1.5 µm height
producer: MikroMasch |

|
200,- €
|
 |
TGF11 |
10 µm pitch / 54.44 deg angle
line pattern, 1.8 µm height
producer: MikroMasch |

|
200,- €
|
 |
TGF11
|
producer: MikroScience |
|
200,- €
|
 |
TGT1
|
2.12 µm tip to tip distance
producer: NT-MDT |

|
300,- €
|
 |
PA01
|
tip characterizer
porous Aluminium
producer: MikroMasch |

|
200,- €
|
 |
|
|