Anfatec Instruments AG
Measurement Science and Technology &
Scanning Probe Microscopy

Calibration Gratings for SPM Applications

Overview X-Y-Z-calibration

Type Pitch / Description Picture Price
UMG01 2 m pitch chess pattern/
4 m pitch line pattern/
21 nm height
110,- €
UMG02 2 m pitch chess pattern/
4 m pitch line pattern/
  52 nm height
UMG02
110,- €
UMG03Pt 2 m pitch chess pattern/
4 m pitch line pattern/
58 nm height
PtSi-coated

110,- €
TGZ01XYZ
TGZ02XYZ
TGZ03XYZ
5 & 10 m pitch
Squares and holes

20/100/500 nm deep

200,- €

Height Calibration

Type Pitch / Description Picture Price
UMG01
UMG02
UMG03Pt

Height:
  21 nm
  52 nm
  58 nm
Chess/Line grating, 2/4 m pitch
producer: Anfatec

110,- €
TGZ01
TGZ02
TGZ03

Height:
  20 nm
  98 nm
  496 nm
Line grating, 3 m pitch
producer: MikroMasch

100,- €
TGZ1
TGZ2
TGZ3

Height:
19 nm
104 nm
540 nm
Line grating, 3 m pitch
producer: NT-MDT

100,- €

Lateral Calibration

Type Pitch / Description Picture Price
TGX01
TGX01P
3 m pitch chess pattern
130 nm depth
producer: Mikromasch
200,- €
TGX11
TGX11P
10 m pitch chess pattern
130 nm depth
producer: Mikromasch
200,- €
TGX1
3 m pitch chess pattern
130 nm depth
producer: NT-MDT

200,- €
TGQ1
3 m pitch chess pattern
19.5 nm depth
producer: NT-MDT

300,- €
TDG01

TDG1Au
278  pitch line pattern
> 55 nm depth
producer: NT-MDT

200,- €



Linearity Calibration / Tip calibration

Type Pitch / Description Picture Price
TGG1 3 m pitch / 70 angle
line pattern, 1.5 m height
producer: NT-MDT
200,- €
TGG01 3 m pitch / 70 angle
line pattern, 1.5 m height
producer: MikroMasch

200,- €
TGF11 10 m pitch / 54.44 angle
line pattern, 1.8 m height
producer: MikroMasch

200,- €
TGT1
2.12 m tip to tip distance

producer: NT-MDT

300,- €
PA01 tip characterizer
porous Aluminium
producer: MikroMasch

200,- €