PLL based feedback control
fast & reliable pumping system
final pressure: 3E-5 hPa (mbar)
pumping time: < 10 min
scan range: 50 µm x 50 µm
lateral resolution 5 nm
height resolution: < 0.1 nm
frequency resolution: 0.2 Hz
“Guery” is a Level AFM under high vacuum. It includes a turbo molecular pump and an oil free pre-vacuum pump, that
evacuate the vacuum bell jar within less than 10 minutes to a pressure of 3E-5 hPa (mbar).
The main application for this device is for samples,
which have been prepared in HV chambers and cannot be stored
ambient pressure for a long time without changing their surface properties.