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Calibration Grating Sets TGS03

Consisting of:








TGG01

TGX01

PA01

Step height 1.8 Ám 1 Ám -
Pitch 3.0 Ám ▒ 5 nm 3.0 Ám ▒ 5 nm -
Active area 3 x 3 mm 2 x 2 mm 5 x 5 mm