Calibration Grating Sets TGS02
Consisting of:
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TGZ01
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TGZ02
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TGZ03
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TGG01
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TGX01
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PA01
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Step height
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22.5 nm ± 0.5 nm
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120 nm ± 0.5 nm
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506 nm ± 5 nm
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1.8 µm
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1 µm
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-
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Pitch
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3.0 µm
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3.0 µm
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3.0 µm
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3.0 µm ± 5 nm
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3.0 µm ± 5 nm
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-
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Active area
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3 x 3 mm
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3 x 3 mm
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3 x 3 mm
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3 x 3 mm
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2 x 2 mm
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5 x 5 mm
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