Calibration Grating Sets TGS02

Consisting of:


	TGZ01	TGZ02	TGZ03	TGG01	TGX01	PA01
Step height	22.5 nm ± 0.5 nm	120 nm ± 0.5 nm	506 nm ± 5 nm	1.8 µm	1 µm	-
Pitch	3.0 µm	3.0 µm	3.0 µm	3.0 µm ± 5 nm	3.0 µm ± 5 nm	-
Active area	3 x 3 mm	3 x 3 mm	3 x 3 mm	3 x 3 mm	2 x 2 mm	5 x 5 mm