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Calibration Grating Sets TGS01

Consisting of:








TGZ01

TGZ02

TGZ03

Step height 22.5 nm ▒ 0.5 nm 120 nm ▒ 0.5 nm 506 nm ▒ 5 nm
Pitch 3.0 Ám 3.0 Ám 3.0 Ám
Active area 3 x 3 mm 3 x 3 mm 3 x 3 mm