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Calibration Grating TGG01

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Typical applications


Lateral calibration

The TGG silicon calibration grating (5 x 5 x 0.45 mm) is a 1-D array of triangular steps for tip characterization in contact mode.

Description



Step height : 1.8 µm
Pitch* : 3.0 µm ± 5 nm
Active area : 3 mm x 3 mm
Edge radii : < 10 nm
Edge curvature radii : < 10 nm
Active area : 3 mm x 3 mm
* equals periodicity of the gratings

Grating dimensions:



1: flat, no structures
2: grating center, triangular line pattern