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Calibration Gratings for SPM Applications

Overview X-Y-Z-calibration

Type Pitch / Description Picture Price [€] Buy
UMG01 2 µm pitch chess pattern/
4 µm pitch line pattern/
21 nm height
100,- €
WEBSHOP
UMG02 2 µm pitch chess pattern/
4 µm pitch line pattern/
  52 nm height
UMG02
100,- €
WEBSHOP
UMG500 500 nm chess pitch
20 µm line pitch
height = 20 nm
UMG500
200,- € WEBSHOP
TGZ01XYZ
TGZ02XYZ
TGZ03XYZ
5 & 10 µm pitch
Squares and holes

20/100/500 nm deep

200,- €
WEBSHOP

Height Calibration

Type Pitch / Description Picture Price [�]
UMG01
UMG02

Height:
 21 nm
  58 nm
Chess/Line grating, 2/4 �m pitch
producer: Anfatec

100,- €
WEBSHOP
TGZ01
TGZ02
TGZ03

Height:
 20 nm
 98 nm
 496 nm
Line grating, 3 µm pitch
producer: MikroMasch

100,- €
WEBSHOP
TGZ1
TGZ2
TGZ3

Height:
19 nm
104 nm
540 nm
Line grating, 3 µm pitch
producer: TipsNano

100,- €
WEBSHOP
TGZ1 Producer: MikroScience 100,- € WEBSHOP
SHS-01 Producer: AppNano 300,- € WEBSHOP

Lateral Calibration

Type Pitch / Description Picture Price [�]
TGX01
TGX01P
3 µm pitch chess pattern
130 nm depth
producer: Mikromasch
200,- €
WEBSHOP
TGX11
TGX11P
10 µm pitch chess pattern
130 nm depth
producer: Mikromasch
200,- €
WEBSHOP
TGX1
3 µm pitch chess pattern
130 nm depth
producer: TipsNano

200,- €
WEBSHOP
TGQ1
3 µm pitch chess pattern
19.5 nm depth
producer: NT-MDT

300,- €
WEBSHOP
TDG01
278  pitch line pattern
> 55 nm depth
producer: NT-MDT

255,- €
WEBSHOP

Linearity Calibration / Tip calibration

Type Pitch / Description Picture Price [�]
TGG1 3 µm pitch / 70 deg angle
line pattern, 1.5 µm height
producer: NT-MDT
200,- €
WEBSHOP
TGG01 3 µm pitch / 70 deg angle
line pattern, 1.5 µm height
producer: MikroMasch

200,- €
WEBSHOP
TGF11 10 µm pitch / 54.44 deg angle
line pattern, 1.8 µm height
producer: MikroMasch

200,- €
WEBSHOP
TGF11
producer: MikroScience 200,- €
WEBSHOP
TGT1
2.12 µm tip to tip distance

producer: NT-MDT

300,- €
WEBSHOP
PA01 tip characterizer
porous Aluminium
producer: MikroMasch

200,- €
WEBSHOP