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Ultrasharp TM Silicon Cantilever from MikroMasch



Single- lever









Cantilever Resonance Frequency, kHz Force Constant, N/m Length
l ± 5µm
Width
w ± 3µm
Thickness
t ± 0.5µm
min typ max min typ max
14 Series 110 160 220 1.8 5 13 125 25 2.1
15 Series 265 325 410 20 40 80 125 30 4.0
16 Series 170 190 210 30 45 70 225 37.5 7.0
17 Series 10 13 17 0.06 0.18 0.4 450 50 2.0
18 Series 60 75 90 1.2 2.8 5.5 225 27.5 3.0
19 Series 25 65 120 0.05 0.5 2.3 125 22.5 1.0


THREE- lever









Cantilever Resonance Frequency, kHz Force Constant, N/m Length
l ± 5µm
Width
w ± 3µm
Thickness
t ± 0.5µm
min typ max min typ max
35 Series
A 130 205 290 2.7 8.9 24 110 35 2.0
B 185 300 430 4.8 16 44 90 35 2.0
C 95 150 205 1.7 5.4 14 130 35 2.0
36 Series
A 30 90 160 0.1 1 4.6 110 32.5 1.0
B 45 130 240 0.2 2 9 90 32.5 1.0
C 25 65 115 0.06 0.06 2.7 130 32.5 1.0
37 Series
A 30 40 55 0.3 0.8 2 250 35 2.0
B 15 20 30 0.1 0.3 0.6 350 35 2.0
C 20 30 40 0.1 0.4 1 300 35 2.0
38 Series
A 8 20 32 0.01 0.09 0.36 250 32.5 1.0
B 5 10 17 0.003 0.03 0.13 350 32.5 1.0
C 6 14 23 0.005 0.05 0.21 300 32.5 1.0


FOUR- lever









Cantilever Resonance Frequency, kHz Force Constant, N/m Length
l ± 5µm
Width
w ± 3µm
Thickness
t ± 0.5µm
min typ max min typ max
11 Series
A 12 15 18 0.1 0.2 0.4 500 30 2.7
B 60 80 100 1.1 2.7 5.6 210 30 2.7
C 115 155 200 3 7 16 150 30 2.7
D 250 350 465 17 42 90 100 50 2.7
12 Series
A - 17 - - 0.2 - 200 28 500
B - 67 - - 0.32 - 100 13.5 500